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Isolated silicon waveguides via porous silicon formation by targeted fluorine doping
Joshua D. Winans, Jonathan Y. Lee, Bharat Veeramachaneni, Shaoting Hu, Daiji Kawamura, Kevin Witt, Karl D. Hirschman, Philippe M. FauchetVolume:
208
Year:
2011
Language:
english
Pages:
3
DOI:
10.1002/pssa.201000125
File:
PDF, 340 KB
english, 2011