Continuum simulation of solid phase epitaxial regrowth of...

physica status solidi (a) 2011 Vol. 208; Iss. 3

Continuum simulation of solid phase epitaxial regrowth of amorphized silicon including most advanced physical interactions

Julien Delalleau, Ardechir Pakfar, El-Medhi Bazizi, Roberto Simola, Clement Tavernier
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Volume:
208
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/pssa.201000228
File:
PDF, 277 KB
english, 2011
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