Chemical functional polymers for direct UV assisted...

Chemical functional polymers for direct UV assisted nanoimprinting of polymeric photonic microring resonators

Robert Kirchner, Marie-Kathrin Kaiser, Barbara Adolphi, Rene Landgraf, Wolf-Joachim Fischer
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Volume:
208
Year:
2011
Language:
english
Pages:
7
DOI:
10.1002/pssa.201000949
File:
PDF, 801 KB
english, 2011
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