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Role of postannealing temperature on the microstructure of Al2O3/ZnO thin films grown by atomic layer deposition for TFT applications
Yong Woon Jang, Seokhwan Bang, Hyeongtag Jeon, Jeong Yong LeeVolume:
207
Year:
2010
Language:
english
Pages:
5
DOI:
10.1002/pssa.201026065
File:
PDF, 728 KB
english, 2010