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Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications
K. Brueckner, F. Niebelschuetz, K. Tonisch, Ch. Foerster, V. Cimalla, R. Stephan, J. Pezoldt, T. Stauden, O. Ambacher, M. A. HeinVolume:
208
Year:
2011
Language:
english
Pages:
20
DOI:
10.1002/pssa.201026343
File:
PDF, 1.38 MB
english, 2011