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Imaging and identifying defects in nitride semiconductor thin films using a scanning electron microscope
G. Naresh-Kumar, B. Hourahine, A. Vilalta-Clemente, P. Ruterana, P. Gamarra, C. Lacam, M. Tordjman, M. A. di Forte-Poisson, P. J. Parbrook, A. P. Day, G. England, C. Trager-CowanVolume:
209
Year:
2012
Language:
english
Pages:
3
DOI:
10.1002/pssa.201100416
File:
PDF, 216 KB
english, 2012