Stochastic Simulation Studies of Line-Edge Roughness in Block Copolymer Lithography
Kim, Sang-KonVolume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.8451
Date:
August, 2014
File:
PDF, 1.00 MB
english, 2014