Stochastic Simulation Studies of Line-Edge Roughness in...

Stochastic Simulation Studies of Line-Edge Roughness in Block Copolymer Lithography

Kim, Sang-Kon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.8451
Date:
August, 2014
File:
PDF, 1.00 MB
english, 2014
Conversion to is in progress
Conversion to is failed