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Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
Mustafa Alevli, Cagla Ozgit, Inci Donmez, Necmi BiyikliVolume:
209
Year:
2012
Language:
english
Pages:
6
DOI:
10.1002/pssa.201127430
File:
PDF, 748 KB
english, 2012