Two-step diffusion process for EPIC technology

Two-step diffusion process for EPIC technology

V. K. Bashenov, S. A. Garyainov, A. K. Mednikov, V. I. Soloshenko
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Volume:
10
Year:
1972
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210100239
File:
PDF, 158 KB
english, 1972
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