Influence of Preamorphization on Concentration Profiles of...

physica status solidi (a) 1975 Vol. 27; Iss. 2

Influence of Preamorphization on Concentration Profiles of Boron Implanted into Silicon

A. Barcz, W. Rosinski, A. Turos, L. Wielunski, B. Wojtowicz-Natanson
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Volume:
27
Year:
1975
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210270248
File:
PDF, 150 KB
english, 1975
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