Analysis of silicon oxynitride layers by the complementary use of elastic backscattering and nuclear reactions
A. Barcz, A. Turos, L. Wieluński, I. SkrzyneckaVolume:
28
Year:
1975
Language:
english
Pages:
9
DOI:
10.1002/pssa.2210280134
File:
PDF, 479 KB
english, 1975