Analysis of silicon oxynitride layers by the complementary...

Analysis of silicon oxynitride layers by the complementary use of elastic backscattering and nuclear reactions

A. Barcz, A. Turos, L. Wieluński, I. Skrzynecka
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
28
Year:
1975
Language:
english
Pages:
9
DOI:
10.1002/pssa.2210280134
File:
PDF, 479 KB
english, 1975
Conversion to is in progress
Conversion to is failed