Planar square spiral inductor generated through indium–tin...

Applied Physics A: Materials Science & Processing 2016 / 4 Vol. 122; Iss. 4

Planar square spiral inductor generated through indium–tin oxide film removal by using UV laser ablation

Yang, Ching-Ching, Hung, Min-Wei, Tsai, Hsin-Yi, Chuang, Wen-Ning, Huang, Kuo-Cheng
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Volume:
122
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-016-9997-7
Date:
April, 2016
File:
PDF, 3.15 MB
english, 2016
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