Reliability characterization of a soot particle sensor in...

Microsystem Technologies 2016 / 3 Vol. 22; Iss. 3

Reliability characterization of a soot particle sensor in terms of stress- and electromigration in thin-film platinum

Rusanov, Radoslav, Rank, Holger, Fuchs, Tino, Mueller-Fiedler, Roland, Kraft, Oliver
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2576-6
Date:
March, 2016
File:
PDF, 2.05 MB
english, 2016
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