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High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation
Wang, Geng, Chen, Guoqiang, Bai, FuzhongVolume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2638-9
Date:
October, 2016
File:
PDF, 1.65 MB
english, 2016