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Microsystem Technologies 2016 / 3

Continuous ultra-thin carbon nitride thin film for magnetic hard disk via post nitrogen plasma treatment

Lawrence Ng, Wah, binti Abu Bakar, Amalina Balqis, bin Azmi, Mohammad Azrul Firdhaus, Wee Shen, Khoo, Meng, Yonggang
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2909-0
Date:
March, 2016
File:
PDF, 1.31 MB
english, 2016
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