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Investigation into the Effect of Concentration of Benzotriazole on the Selective Layer Surface in the Chemical Mechanical Planarization Process
Ilie, Filip, Laurian, TiberiuVolume:
24
Language:
english
Journal:
Journal of Materials Engineering and Performance
DOI:
10.1007/s11665-015-1751-3
Date:
December, 2015
File:
PDF, 1.64 MB
english, 2015