Investigation of laser induced diffusion and annealing...

Investigation of laser induced diffusion and annealing processes of arsenic-implanted silicon crystals

H.-D. Geiler, G. Götz, K.-D. Klinge, N. Triem
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Volume:
41
Year:
1977
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210410261
File:
PDF, 129 KB
english, 1977
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