![](/img/cover-not-exists.png)
Investigation of laser induced diffusion and annealing processes of arsenic-implanted silicon crystals
H.-D. Geiler, G. Götz, K.-D. Klinge, N. TriemVolume:
41
Year:
1977
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210410261
File:
PDF, 129 KB
english, 1977