Range and damage profiling after heavy ion implantation in the MeV region
H. F. Kappert, K. F. Heidemann, B. Grabe, E. te KaatVolume:
47
Year:
1978
Language:
english
Pages:
12
DOI:
10.1002/pssa.2210470250
File:
PDF, 934 KB
english, 1978