13.56 and 100 MHz Coupled Mode Rf-Sputtering for...

Ferroelectrics 2008 / 10 Vol. 368; Iss. 1

13.56 and 100 MHz Coupled Mode Rf-Sputtering for Ferroelectric Sr 2 (Ta 1 − x ,Nb x ) 2 O 7 (STN) Film Applied to One-Transistor Type Ferroelectric Random Access Memory

Takahashi, Ichirou, Hirayama, Masaki, Shirai, Yasuyuki, Teramoto, Akinobu, Sugawa, Shigetoshi, Ohmi, Tadahiro
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Volume:
368
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190802368008
Date:
October, 2008
File:
PDF, 1.31 MB
english, 2008
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