Some investigation of Si and SiO2 surfaces etched in CF4 or...

Some investigation of Si and SiO2 surfaces etched in CF4 or CF4O2 plasma

E. D. Atanasova, K. I. Kirov, B. G. Pantchev, S. S. Georgiev
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Volume:
59
Year:
1980
Language:
english
Pages:
7
DOI:
10.1002/pssa.2210590253
File:
PDF, 1.50 MB
english, 1980
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