Silicon amorphization by ion beam with radiation heating
A. B. Danilin, A. V. Dvurechenskii, I. A. Ryazantsev, P. A. Timofeev, V. D. VernerVolume:
65
Year:
1981
Language:
english
Pages:
9
DOI:
10.1002/pssa.2210650206
File:
PDF, 525 KB
english, 1981