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Laser annealing of thin buried amorphous layers in silicon
G. Götz, H. D. Geiler, M. Wagner, K. H. Heinig, H. WoittenneckVolume:
65
Year:
1981
Language:
english
Pages:
6
DOI:
10.1002/pssa.2210650234
File:
PDF, 313 KB
english, 1981