Annealing of Antimony Implanted Silicon with Halogen Lamp...

physica status solidi (a) 1982 Vol. 72; Iss. 2

Annealing of Antimony Implanted Silicon with Halogen Lamp Irradiation

V. E. Borisenko, V. A. Labunov
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Volume:
72
Year:
1982
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210720262
File:
PDF, 174 KB
english, 1982
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