Annealing of Implanted Silicon under the Action of...

physica status solidi (a) 1983 Vol. 79; Iss. 1

Annealing of Implanted Silicon under the Action of Microsecond Pulsed TEA-CO2 Laser Radiation

L. Nanu, Doina Bǎrbulescu, I. N. Mihǎilescu, V. Teodorescu, Leona C. Nistor
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
79
Year:
1983
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210790140
File:
PDF, 172 KB
english, 1983
Conversion to is in progress
Conversion to is failed