Electron-Microscopic Study of Microdefects in Silicon Single Crystals Grown at High Speed
A. A. Sitnikova, L. M. Sorokin, I. E. Talanin, E. G. Sheikhet, E. S. FalkevichVolume:
81
Year:
1984
Language:
english
Pages:
6
DOI:
10.1002/pssa.2210810203
File:
PDF, 507 KB
english, 1984