The influence of foreigen atoms on the epitaxial annealing...

The influence of foreigen atoms on the epitaxial annealing of ion-implanted silicon

H. Kerkow, G. Kreysch, B. Lukasch
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
82
Year:
1984
Language:
english
Pages:
9
DOI:
10.1002/pssa.2210820115
File:
PDF, 508 KB
english, 1984
Conversion to is in progress
Conversion to is failed