Solid phase epitaxial growth anisotropy of vacuum-deposited amorphous silicon
I. G. Kaverina, V. V. Korobtsov, V. G. Zavodinskii, A. V. ZotovVolume:
82
Year:
1984
Language:
english
Pages:
9
DOI:
10.1002/pssa.2210820202
File:
PDF, 580 KB
english, 1984