Damage and Trapping Behaviour of Crystalline Silicon at Low...

physica status solidi (a) 1984 Vol. 85; Iss. 1

Damage and Trapping Behaviour of Crystalline Silicon at Low Energy Deuterium Implantation

D. Hildebrandt, H. Strusny, R. Groetzschel, E. Kotai, F. Paszti
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Volume:
85
Year:
1984
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210850146
File:
PDF, 200 KB
english, 1984
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