Defect Structure Study with Planar Channeling in...

physica status solidi (a) 1984 Vol. 85; Iss. 1

Defect Structure Study with Planar Channeling in Pulse-Annealed Ion-Implanted Silicon

A. V. Dvurechenskii, B. P. Kashnikov, G. P. Pokhil, V. P. Popov, A. V. Tulinov, A. A. Turinge
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Volume:
85
Year:
1984
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210850147
File:
PDF, 208 KB
english, 1984
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