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Investigation of amorphous W60Zr40 film as a diffusion barrier in metallization schemes
M. F. Zhu, F. C. T. So, E. T-S. Pan, M-A. NicoletVolume:
86
Year:
1984
Language:
english
Pages:
6
DOI:
10.1002/pssa.2210860202
File:
PDF, 391 KB
english, 1984