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Effect of Chlorine Implantation on Phosphorus Predeposition in Silicon
S. Solmi, A. Armigliato, D. Govoni, R. Lotti, P. Negrini, M. Servidori, A. ZaniVolume:
89
Year:
1985
Language:
english
Pages:
7
DOI:
10.1002/pssa.2210890214
File:
PDF, 497 KB
english, 1985