Hydrogen Implantation into Silicon. Infra-Red Absorption...

physica status solidi (a) 1985 Vol. 91; Iss. 2

Hydrogen Implantation into Silicon. Infra-Red Absorption Spectra and Electrical Properties

B. N. Mukashev, M. F. Tamendarov, S. Zh. Tokmoldin, V. V. Frolov
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Volume:
91
Year:
1985
Language:
english
Pages:
14
DOI:
10.1002/pssa.2210910219
File:
PDF, 1.15 MB
english, 1985
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