Precipitation of implanted xenon in silicon
C. Templier, B. Boubeker, H. Garem, E. L. Mathé, J. C. DesoyerVolume:
92
Year:
1985
Language:
english
Pages:
6
DOI:
10.1002/pssa.2210920222
File:
PDF, 384 KB
english, 1985