Defects in supersaturated solid solution of arsenic in...

physica status solidi (a) 1986 Vol. 94; Iss. 2

Defects in supersaturated solid solution of arsenic in silicon at rapid thermal annealing

V. P. Popov, A. V. Dvurechenskii, B. P. Kashnikov, A. I. Popov
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Volume:
94
Year:
1986
Language:
english
Pages:
4
DOI:
10.1002/pssa.2210940217
File:
PDF, 293 KB
english, 1986
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