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Effect of hydrogen on photoluminescence spectra of silicon nitride amorphous films
V. V. Vasilev, I. P. Mikhailovskii, K. K. SvitashevVolume:
95
Year:
1986
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210950154
File:
PDF, 275 KB
english, 1986