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Laser annealing of bismuth-implanted (111) silicon
V. Rybka, V. Odzhaev, J. Cervena, V. Hnatowicz, J. Kvítek, H. JelínkováVolume:
95
Year:
1986
Language:
english
Pages:
5
DOI:
10.1002/pssa.2210950219
File:
PDF, 293 KB
english, 1986