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Investigation of Silicides Obtained by Fe+ Implantation into Silicon
V. Yu. Petukhov, I. B. Khaibullin, M. M. Zaripov, R. Groetzschel, M. Voelskow, R. KlabesVolume:
96
Year:
1986
Language:
english
Pages:
6
DOI:
10.1002/pssa.2210960211
File:
PDF, 348 KB
english, 1986