Investigations of Interface States in Si/Si-Oxynitride/Al...

physica status solidi (a) 1986 Vol. 98; Iss. 1

Investigations of Interface States in Si/Si-Oxynitride/Al Structures Using DLTS

K.-D. Ufert, W. Ecke, M. Manzel, W. Michalke, J. Salm
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Volume:
98
Year:
1986
Language:
english
Pages:
1
DOI:
10.1002/pssa.2210980152
File:
PDF, 188 KB
english, 1986
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