![](/img/cover-not-exists.png)
The application of Moiré fringes to check the quality of surface relief gratings by using SEM
O. Salminen, T. Keinonen, R. Lindström, P. SilfstenVolume:
100
Year:
1987
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211000145
File:
PDF, 189 KB
english, 1987