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[IEEE 2015 International Conference on IC Design & Technology (ICICDT) - Leuven, Belgium (2015.6.1-2015.6.3)] 2015 International Conference on IC Design & Technology (ICICDT) - Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout
Ikeda, Taro, Tanihara, Akira, Yamamoto, Nobuhiko, Kasai, Shigeru, Eriguchi, Koji, Ono, KouichiYear:
2015
Language:
english
DOI:
10.1109/icicdt.2015.7165901
File:
PDF, 778 KB
english, 2015