Sold Phase Epitaxy of Doped Silicon Films in Molecular Beam Epitaxy Systems
V. V. Korobtsov, V. G. Lifshits, A. V. Zotov, V. G. ShengurovVolume:
103
Year:
1987
Language:
english
Pages:
7
DOI:
10.1002/pssa.2211030217
File:
PDF, 467 KB
english, 1987