Influence of argon implantation on the formation of...

Influence of argon implantation on the formation of platinum silicides

V. E. Borisenko, D. I. Zarovskii, V. V. Tokarev
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Volume:
107
Year:
1988
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211070154
File:
PDF, 138 KB
english, 1988
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