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Redistribution of boron in silicon by high-temperature irradiation with heavy ions
G. A. Kachurin, I. E. Tyshcrenko, E. Wieser, Ch. WeiseVolume:
109
Year:
1988
Language:
english
Pages:
8
DOI:
10.1002/pssa.2211090114
File:
PDF, 487 KB
english, 1988