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Plasma Stimulated Impurity Redistribution in Silicon
S. V. Koveshnikov, E. B. Yakimov, N. A. Yarykin, V. A. YunkinVolume:
111
Year:
1989
Language:
english
Pages:
8
DOI:
10.1002/pssa.2211110108
File:
PDF, 426 KB
english, 1989