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Deposition of Hydrogenated Amorphous Carbon Films by an ECR Microwave Plasma
W. Scharff, K. Hammer, B. Eibisch, O. Stenzel, S. Roth, T. FradenheimVolume:
112
Year:
1989
Language:
english
Pages:
11
DOI:
10.1002/pssa.2211120222
File:
PDF, 527 KB
english, 1989