![](/img/cover-not-exists.png)
Initial Energy Distribution of Sputtered Atoms in DC Diode Systems
D. Czekaj, E. K. Hollmann, A. B. Kozirev, V. A. Volpyas, A. G. ZaitsevVolume:
114
Year:
1989
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211140150
File:
PDF, 165 KB
english, 1989