In-Situ P Doped Epitaxial Si1−xCx Growth Under UHV-CVD

Journal of Nanoscience and Nanotechnology 2014 / 10 Vol. 14; Iss. 10

In-Situ P Doped Epitaxial Si1−xCx Growth Under UHV-CVD

Koo, Sangmo, Yoo, Jung-Ho, Kim, Sun-Wook, Ko, Dae-Hong
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Volume:
14
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2014.9391
Date:
October, 2014
File:
PDF, 8.09 MB
english, 2014
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