Modification of polycrystalline BN, AIN, and Si3N4 surfaces by ion beams
V. V. Lopatin, A. V. Kabyshev, L. S. BushnevVolume:
116
Year:
1989
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211160158
File:
PDF, 174 KB
english, 1989