Photo-induced metastable states in silicon nitride...

physica status solidi (a) 1989 Vol. 116; Iss. 1

Photo-induced metastable states in silicon nitride amorphous layers

V. A. Nadolinnyi, V. V. Vasilev, I. P. Mikhailovskii
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Volume:
116
Year:
1989
Language:
english
Pages:
1
DOI:
10.1002/pssa.2211160166
File:
PDF, 237 KB
english, 1989
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