Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine
Greer, Andrew IM, Della-Rosa, Benoit, Khokhar, Ali Z., Gadegaard, NikolajVolume:
11
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/s11671-016-1341-9
Date:
December, 2016
File:
PDF, 2.05 MB
english, 2016